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High-Resolution Mems Inclinometer Based on Pull-In Voltage
AuthID
P-00G-2PK
5
Author(s)
Alves F., S
·
Dias R., A
·
Cabral J., M
·
Gaspar, J
·
Rocha L., A
Document Type
Article in Press
Year published
2014
Published
in
Journal of Microelectromechanical Systems,
ISSN: 1057-7157
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Scopus
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®
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Publication Identifiers
DOI
:
10.1109/jmems.2014.2359633
Scopus
: 2-s2.0-84908042842
Source Identifiers
ISSN
: 1057-7157
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