Dynamic Wet Etching of Silicon Through Isopropanol Alcohol Evaporation

AuthID
P-00G-VNV
5
Author(s)
Monteiro, TS
·
Kastytis, P
·
Document Type
Article
Year published
2015
Published
in MICROMACHINES, ISSN: 2072-666X
Volume: 6, Issue: 10, Pages: 1534-1545 (12)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-84946399283
Wos: WOS:000364240500012
Source Identifiers
ISSN: 2072-666X
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