Incorporation of N in Tio2 Films Grown by Dc-Reactive Magnetron Sputtering

AuthID
 P-00H-CJV
6
Author(s)
Sério, S
·
Melo Jorge, M
·
Barradas, N
·
Munnik, F
Document Type
Article
Year published
2012
Published
in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, ISSN: 0168-583X
Volume: 273, Pages: 109-112
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Source Identifiers
ISSN: 0168-583X
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