Deposition of Silicon Nitride Thin Films by Hot-Wire Cvd at 100 °C and 250 °C

AuthID
 P-00H-EGJ
6
Author(s)
Gonçalves, L
·
Marins, E
·
Viseu, T
·
Document Type
Article
Year published
2009
Published
in Thin Solid Films, ISSN: 0040-6090
Volume: 517, Issue: 12, Pages: 3503-3506
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ISSN: 0040-6090
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