Publications

Radial Profile of the Electron Energy Distribution Function in Rf Capacitive Gas-Discharge Plasma

AuthID
P-00K-EB8

Author(s)

Dimitrova, M

Popov, T

Puac, N

Skoro, N

Spasic, K

Malovic, G

Dias, FM

Petrovic, ZL

Editor(s)

Ghelev C.van de Sanden M.C.M.Dimitrova M.

Document Type

Proceedings Paper

Year published

2016

Published

in Journal of Physics: Conference Series, ISSN: 1742-6588

Volume: 700, Issue: 1, Pages: 012007

Conference

19Th International Summer School on Vacuum, Electron and Ion Technologies, Veit 2015, Date: 21 September 2015 through 25 September 2015, Sponsors: Dutch Institute for Fundamental Energy Research;IUVSTA;Ministry of Education and Science of Republic of Bulgaria

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