Enhanced Sputtering Yield of Nanostructured Samples Under Ar+ Cluster Bombardment

AuthID
P-00R-EAH
12
Author(s)
Pelenovich, V
·
Zeng, XM
·
Zuo, WB
·
Suvorov, D
·
Slivkin, E
·
Hu, DH
·
Tian, CX
·
Neena, D
·
Fu, DJ
·
Yang, B
Document Type
Article
Year published
2020
Published
in VACUUM, ISSN: 0042-207X
Volume: 172
Indexing
Publication Identifiers
Scopus: 2-s2.0-85075531117
Wos: WOS:000509788900058
Source Identifiers
ISSN: 0042-207X
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