Substrate Temperature Influenced Zro2 Films for Mos Devices

AuthID
P-00R-XWX
7
Author(s)
Document Type
Article
Year published
2020
Published
in SURFACE AND INTERFACE ANALYSIS, ISSN: 0142-2421
Volume: 52, Issue: 9, Pages: 541-546 (6)
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Publication Identifiers
Scopus: 2-s2.0-85082405882
Wos: WOS:000521817400001
Source Identifiers
ISSN: 0142-2421
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