Dependence of Optical Properties on Composition of Silicon Carbonitride Thin Films Deposited at Low Temperature by Pecvd

AuthID
 P-00S-VJ1
7
Author(s)
de Carvalho, CN
·
Document Type
Article
Year published
2021
Published
in JOURNAL OF NON-CRYSTALLINE SOLIDS, ISSN: 0022-3093
Volume: 551, Pages: 120434 (6)
Indexing
Wos®
Scopus®
Crossref®10
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-85092396548
Wos: WOS:000589928100002
Source Identifiers
ISSN: 0022-3093
Export Publication Metadata
Marked List
 Add to Marked List
Info
At this moment we don't have any links to full text documens.

A place for researchers and their institutions

Useful Links

Get Help

© 2024 CRACS & Inesc TEC - All Rights Reserved Privacy Policy | Terms of Service