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Oxidation of the Surface of a Thin Amorphous Silicon Film
AuthID
P-002-JWX
4
Author(s)
Silva, AG
·
Pedersen, K
·
Li, ZSS
·
Morgen, P
Document Type
Article
Year published
2011
Published
in
THIN SOLID FILMS,
ISSN: 0040-6090
Volume: 520, Issue: 2, Pages: 697-699 (3)
Conference
18Th International Vacuum Congress (Ivc),
Date:
AUG 23-27, 2010,
Location:
Beijing, PEOPLES R CHINA,
Sponsors:
Int Union Vacuum Sci, Tech & Applicat (IUVSTA), Chinese Vacuum Soc (CVS)
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Publication Identifiers
DOI
:
10.1016/j.tsf.2011.04.189
SCOPUS
: 2-s2.0-80755132243
Wos
: WOS:000297988500007
Source Identifiers
ISSN
: 0040-6090
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