Structural and Mechanical Analysis of Apcvd Deposited Diamond-Like Carbon Thin Films

AuthID
 P-00S-XCG
5
Author(s)
Ghadai, RK
·
Das, S
·
Kalita, K
·
Swain, BP
·
Document Type
Article in Press
Year published
2020
Published
in SILICON, ISSN: 1876-990X
Volume: 13, Issue: 12, Pages: 4453-4462 (10)
Indexing
Wos®
Scopus®
Crossref®14
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-85092737955
Wos: WOS:000578989400003
Source Identifiers
ISSN: 1876-990X
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