A Reaction Mechanism for Oxygen Plasmas

AuthID
 P-00Y-XGJ
6
Author(s)
Dias, TC
·
Fromentin, C
·
Tejero-del-Caz, A
·
Tipo de Documento
Article
Year published
2023
Publicado
in PLASMA SOURCES SCIENCE & TECHNOLOGY, ISSN: 0963-0252
Volume: 32, Número: 8, Páginas: 084003 (22)
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Publication Identifiers
SCOPUS: 2-s2.0-85167866155
Wos: WOS:001044526600001
Source Identifiers
ISSN: 0963-0252
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