Unusual Growth Behavior of Atomic Layer Deposited Pbtio3 Thin Films Using Water and Ozone As Oxygen Sources and Their Combination

AuthID
 P-003-4Q4
6
Author(s)
Lee, HJ
·
Park, MH
·
Min, YS
·
Hwang, CS
Document Type
Article
Year published
2010
Published
in JOURNAL OF PHYSICAL CHEMISTRY C, ISSN: 1932-7447
Volume: 114, Issue: 29, Pages: 12736-12741 (6)
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Scopus®
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Publication Identifiers
Scopus: 2-s2.0-77954934297
Wos: WOS:000280070900049
Source Identifiers
ISSN: 1932-7447
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