Biocompatibility and Surface Properties of Hydrogenated Amorphous Silicon-Germanium Thin Films Prepared by Lf-Pecvd

AuthID
 P-00Z-GYT
7
Author(s)
Huerta, FL
·
García, RMW
·
González, LG
·
Arriaga, WC
·
Vega, R
·
Soto, E
Tipo de Documento
Article
Year published
2019
Publicado
in IOP Conference Series: Materials Science and Engineering, ISSN: 1757-8981
Volume: 628, Número: 1, Páginas: 012003
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ISSN: 1757-8981
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