Design and Fabrication of a Microelectromechanical System Resonator Based on Two Orthogonal Silicon Beams with Integrated Mirror for Monitoring In-Plane Magnetic Field

AuthID
 P-00Z-GZM
6
Author(s)
Acevedo-Mijangos J.
·
Ramírez-Treviño A.
·
May-Arrioja D.A.
·
LiKamWa P.
·
Vázquez-Leal H.
·
Document Type
Article
Year published
2019
Published
in Advances in Mechanical Engineering, ISSN: 16878132
Volume: 11, Issue: 7, Pages: 168781401985368
Indexing
Scopus®
Crossref®2
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-85068597089
Source Identifiers
ISSN: 16878132
Export Publication Metadata
Lista Marked
 Adicionar à lista Marked
Info
At this moment we don't have any links to full text documens.

Um espaço para investigadores e suas instituições

Useful Links

Get Help

© 2024 CRACS & Inesc TEC - All Rights Reserved Privacy Policy | Terms of Service