Design and Fabrication of a Microelectromechanical System Resonator Based on Two Orthogonal Silicon Beams with Integrated Mirror for Monitoring In-Plane Magnetic Field

AuthID
 P-00Z-GZM
6
Author(s)
Acevedo-Mijangos J.
·
Ramírez-Treviño A.
·
May-Arrioja D.A.
·
LiKamWa P.
·
Vázquez-Leal H.
·
Tipo de Documento
Article
Year published
2019
Publicado
in Advances in Mechanical Engineering, ISSN: 16878132
Volume: 11, Número: 7, Páginas: 168781401985368
Indexing
Scopus®
Crossref®2
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-85068597089
Source Identifiers
ISSN: 16878132
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