Synthesis of Silicon-Carbon Films by Induction-Assisted Plasma-Chemical Deposition

AuthID
P-00Z-M43
12
Author(s)
Temirov, A
·
Kubasov, V
·
Turutin, V
·
Ilina, S
·
Kislyuk, M
·
Kiselev, A
·
Skryleva, A
·
Salimon, A
·
Batrameev, V
·
Malinkovich, D
·
Parkhomenko, N
Tipo de Documento
Article
Year published
2023
Publicado
in Modern Electronic Materials, ISSN: 2452-2449
Volume: 9, Número: 4, Páginas: 177-184 (7)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-85180438998
Source Identifiers
ISSN: 2452-2449
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