Ion Beam Analysis of Tin/Ti Multilayers Deposited by Magnetron Sputtering

AuthID
P-000-A8Q
7
Author(s)
Andrade, E
·
Flores, M
·
Murillo, G
·
Zavala, EP
·
Rocha, MF
1
Editor(s)
Vizkelethy G.McDaniel F.D.Thevuthasan S.Tesmer J.R.
Document Type
Article
Year published
2004
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 219, Issue: 1-4, Pages: 763-767 (5)
Conference
16Th International Conference on Ion Beam Analysis, Date: JUN 29-JUL 04, 2003, Location: Albuquerque, NM, Sponsors: USAF Res Lab, Lawrence Livermore Natl Lab, Los Alamos Natl Lab, Pacific NW Natl Lab, Sandia Natl Labs
Indexing
Publication Identifiers
Scopus: 2-s2.0-2442538880
Wos: WOS:000221895800144
Source Identifiers
ISSN: 0168-583X
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