Theoretical Insight into Ar-O-2 Surface-Wave Microwave Discharges

AuthID
P-003-6SH
3
Author(s)
Tipo de Documento
Article
Year published
2010
Publicado
in JOURNAL OF PHYSICS D-APPLIED PHYSICS, ISSN: 0022-3727
Volume: 43, Número: 17, Páginas: 175201 (14)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-77951085387
Wos: WOS:000276704200005
Source Identifiers
ISSN: 0022-3727
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