Thin-Film Silicon Mems for Dynamic Mass Sensing in Vacuum and Air: Phase Noise, Allan Deviation, Mass Sensitivity and Limits of Detection (Vol 28, Pg 390, 2019)

AuthID
 P-010-73K
4
Author(s)
Pinto, RMR
·
Brito, P
·
Tipo de Documento
Article in Press
Year published
2024
Publicado
in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, ISSN: 1057-7157
Volume: 33, Número: 3, Páginas: 403-404 (2)
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Publication Identifiers
Wos: WOS:001189561400001
Source Identifiers
ISSN: 1057-7157
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