Quantification of the Sp3 Content in Diamond-Like Carbon Films: Effects of Ne Plasma Addition in Deep Oscillation Magnetron Sputtering

AuthID
 P-010-P3J
5
Author(s)
Vahidi, A
·
Ferreira, F
·
Cavaleiro, A
Tipo de Documento
Article
Year published
2024
Publicado
in APPLIED SURFACE SCIENCE, ISSN: 0169-4332
Volume: 669, Páginas: 160565 (12)
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Publication Identifiers
SCOPUS: 2-s2.0-85196521093
Wos: WOS:001339147600001
Source Identifiers
ISSN: 0169-4332
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