Silicon Etching in Cf≪Sub≫4≪/Sub≫/O≪Sub≫2≪/Sub≫ and Sf≪Sub≫6≪/Sub≫ Atmospheres

AuthID
 P-012-6JW
7
Author(s)
Silva, A
·
Raniero, L
·
Ferreira, E
·
Pereira, L
·
Martins, R
Document Type
Article
Year published
2004
Published
in Materials Science Forum
Volume: 455-456, Pages: 120-123
Indexing
Crossref®
Google Scholar®
Publication Identifiers
Export Publication Metadata
Lista Marked
 Adicionar à lista Marked
Info
At this moment we don't have any links to full text documens.

Um espaço para investigadores e suas instituições

Useful Links

Get Help

© 2024 CRACS & Inesc TEC - All Rights Reserved Privacy Policy | Terms of Service