Mis Photodiodes of Polymorphous Silicon Deposited at Higher Growth Rates by 27.12 Mhz Pecvd Discharge

AuthID
 P-012-6KG
5
Author(s)
Pereira, L
·
Raniero, L
·
Martins, R
Document Type
Article
Year published
2004
Published
in Materials Science Forum
Volume: 455-456, Pages: 73-76
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