Tuneable Properties of Aluminium Oxynitride Thin Films

AuthID
P-013-5KP
12
Author(s)
Borges, J
·
P. Barradas, N
·
Alves, E
·
Martin, N
·
Beaufort, M
·
Camelio, S
·
Eyidi, D
·
Girardeau, T
·
Paumier, F
·
Rivière, J
·
Vaz, F
·
Tipo de Documento
Book Chapter
Year published
2013
Publicado
in Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Páginas: 195-229
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