Features of the Pulsed Treatment of Silicon Layers Implanted with Erbium Ions

AuthID
 P-003-H65
7
Author(s)
Batalov, RI
·
Bayazitov, RM
·
Nurutdinov, RM
·
Kryzhkov, DI
·
Tipo de Documento
Article
Year published
2009
Publicado
in JOURNAL OF SURFACE INVESTIGATION-X-RAY SYNCHROTRON AND NEUTRON TECHNIQUES, ISSN: 1027-4510
Volume: 3, Número: 4, Páginas: 604-607 (4)
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Publication Identifiers
SCOPUS: 2-s2.0-70350605367
Wos: WOS:000270739500020
Source Identifiers
ISSN: 1027-4510
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