Evidence for Oxygen Bubbles in Fluorine Doped Amorphous Silicon Dioxide Thin Films

AuthID
P-013-V6W
3
Author(s)
Dias, AG
·
Bustarret, E
·
Tipo de Documento
Book Chapter
Year published
1988
Publicado
in The Physics and Technology of Amorphous SiO2
Páginas: 353-358
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