Effect of Fluence on the Lattice Site of Implanted Er and Implantation Induced Strain in Gan

AuthID
 P-003-KJS
5
Author(s)
De Vries, B
·
Vantomme, A
·
Tipo de Documento
Article
Year published
2009
Publicado
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 267, Número: 8-9, Páginas: 1340-1344 (5)
Conference
16Th International Conference on Ion Beam Modification of Materials, Date: AUG 31-SEP 05, 2008, Location: Dresden, GERMANY
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Publication Identifiers
SCOPUS: 2-s2.0-65249138969
Wos: WOS:000266519900033
Source Identifiers
ISSN: 0168-583X
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