Global Model and Diagnostic of a Low-Pressure Sf6/Ar Inductively Coupled Plasma

AuthID
 P-003-KMA
5
Author(s)
Lallement, L
·
Rhallabi, A
·
Cardinaud, C
·
Peignon Fernandez, MC
·
Tipo de Documento
Article
Year published
2009
Publicado
in PLASMA SOURCES SCIENCE & TECHNOLOGY, ISSN: 0963-0252
Volume: 18, Número: 2, Páginas: 025001 (10)
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Publication Identifiers
SCOPUS: 2-s2.0-67649852215
Wos: WOS:000265580800004
Source Identifiers
ISSN: 0963-0252
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