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Formation of Ge Nanocrystals and Evolution of the Oxide Matrix in As-Deposited and Annealed Lpcvd Sigeo Films

AuthID
P-003-MCN

Author(s)

Rodriguez, A

Morana, B

Sangrador, J

Rodriguez, T

Kling, A

Ortiz, MI

Ballesteros, C

Tipo de Documento

Article

Year published

2009

Publicado

in SUPERLATTICES AND MICROSTRUCTURES, ISSN: 0749-6036

Volume: 45, Número: 4-5, Páginas: 343-348 (6)

Conference

9Th International Workshop on Beam Injection Assessment of Microstructure in Semiconductors, Date: JUN 29-JUL 03, 2008-2009, Location: Toledo, SPAIN

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Publication Identifiers

DOI: 10.1016/j.spmi.2008.10.037

SCOPUS: 2-s2.0-63149192715

Wos: WOS:000265544400031

Source Identifiers

ISSN: 0749-6036

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Formation of Ge Nanocrystals and Evolution of the Oxide Matrix in As-Deposited and Annealed Lpcvd Sigeo Films

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Formation of Ge Nanocrystals and Evolution of the Oxide Matrix in As-Deposited and Annealed Lpcvd Sigeo Films

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