Surface and Interface Roughness of Ultrathin Nitric Oxide Oxynitride Gate Dielectric

AuthID
 P-014-YY5
5
Author(s)
Hegde, RI
·
Maiti, B
·
Reid, KG
·
Tobin, PJ
Tipo de Documento
Letter
Year published
1998
Publicado
in JOURNAL OF THE ELECTROCHEMICAL SOCIETY, ISSN: 0013-4651
Volume: 145, Número: 1, Páginas: L13-L15 (3)
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Publication Identifiers
Wos: WOS:000071382900005
Source Identifiers
ISSN: 0013-4651
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