Theoretical and Experimental Investigation of Boron Diffusion in Polycrystalline Hfo2 Films

AuthID
 P-014-YYF
9
Author(s)
Liu, CL
·
Jiang, ZX
·
Hegde, RI
·
Sieloff, DD
·
Gilmer, DC
·
Hobbs, CC
·
Tobin, PJ
·
Lu, SF
Tipo de Documento
Article
Year published
2002
Publicado
in APPLIED PHYSICS LETTERS, ISSN: 0003-6951
Volume: 81, Número: 8, Páginas: 1441-1443 (3)
Indexing
Wos®
Crossref®18
Google Scholar®
Publication Identifiers
Wos: WOS:000177351600025
Source Identifiers
ISSN: 0003-6951
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