Physical and Electrical Properties of Metal Gate Electrodes on Hfo2 Gate Dielectrics

AuthID
P-014-YYJ
20
Author(s)
Schaeffer, JK
·
Samavedam, SB
·
Gilmer, DC
·
Dhandapani, V
·
Tobin, PJ
·
Mogab, J
·
Nguyen, BY
·
White, BE
·
Dakshina Murthy, S
·
Jiang, ZX
·
Martin, R
·
Raymond, MV
·
Zavala, M
·
La, LB
·
Smith, JA
·
Garcia, R
·
Roan, D
·
Kottke, M
·
Gregory, RB
Tipo de Documento
Article
Year published
2003
Publicado
in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, ISSN: 1071-1023
Volume: 21, Número: 1, Páginas: 11-17 (7)
Indexing
Publication Identifiers
Wos: WOS:000182603900003
Source Identifiers
ISSN: 1071-1023
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