Effect of Substrate Bias Voltage on Amorphous Si-C-N Films Produced by Pvd Techniques

AuthID
 P-000-BXQ
5
Author(s)
Andres, G
·
Pischow, K
1
Editor(es)
Matthews A.Marchev K.Patscheider J.Pauleau Y.
Tipo de Documento
Article
Year published
2004
Publicado
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 447, Páginas: 436-442 (7)
Conference
30Th International Conference on Metallurgical Coatings and Thin Films, Date: APR 28-MAY 02, 2003, Location: SAN DIEGO, CA
Indexing
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Publication Identifiers
SCOPUS: 2-s2.0-1342347469
Wos: WOS:000188995700078
Source Identifiers
ISSN: 0040-6090
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