Amorphous Silicon Electrostatic Microresonators with High Quality Factors

AuthID
P-000-BY1
3
Author(s)
Tipo de Documento
Article
Year published
2004
Publicado
in APPLIED PHYSICS LETTERS, ISSN: 0003-6951
Volume: 84, Número: 4, Páginas: 622-624 (3)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-1242285003
Wos: WOS:000188316500056
Source Identifiers
ISSN: 0003-6951
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