Silicon Effect on the Hardness of R.f. Sputtered B-C:si Amorphous Films

AuthID
 P-003-RPC
4
Author(s)
Tipo de Documento
Article
Year published
2009
Publicado
in PLASMA PROCESSES AND POLYMERS, ISSN: 1612-8850
Volume: 6, Número: SUPPL. 1, Páginas: S141-S145 (5)
Conference
11Th International Conference on Plasma Surface Engineering, Date: SEP 15-19, 2008, Location: Garmisch Partenkirchen, GERMANY, Patrocinadores: European Joint Comm Plasma & Ion Surface Engn
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Scopus®
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Publication Identifiers
SCOPUS: 2-s2.0-77954894204
Wos: WOS:000272302900029
Source Identifiers
ISSN: 1612-8850
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