Ion Beam Analysis of the Dry Thermal Oxidation of Thin Polycrystalline Sige Films

AuthID
 P-000-178
7
Author(s)
Prieto, AC
·
Jimenez, J
·
Rodriguez, A
·
Rodriguez, T
Tipo de Documento
Article
Year published
2005
Publicado
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 240, Número: 1-2, Páginas: 405-408 (4)
Conference
8Th European Conference on Accelerators in Applied Research and Technology, Date: SEP 20-24, 2004, Location: Paris, FRANCE, Host: Natl Museum Folk Arts & Tradit
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Publication Identifiers
SCOPUS: 2-s2.0-27344448405
Wos: WOS:000233208400079
Source Identifiers
ISSN: 0168-583X
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