Carboxylic Acids as Oxygen Sources for the Atomic Layer Deposition of High-Kappa Metal Oxides

AuthID
 P-003-WYJ
7
Author(s)
Ducroquet, F
·
Matko, I
·
Tipo de Documento
Article
Year published
2008
Publicado
in JOURNAL OF PHYSICAL CHEMISTRY C, ISSN: 1932-7447
Volume: 112, Número: 33, Páginas: 12754-12759 (6)
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Publication Identifiers
SCOPUS: 2-s2.0-51049099984
Wos: WOS:000258443000027
Source Identifiers
ISSN: 1932-7447
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