Silicon Dioxide Atomic Layer Deposition at Low Temperature for Pdms Microlenses Coating

AuthID
 P-017-49A
5
Author(s)
Cunha, FM
·
Tipo de Documento
Article
Year published
2024
Publicado
in OPTICAL MATERIALS, ISSN: 0925-3467
Volume: 157
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Publication Identifiers
SCOPUS: 2-s2.0-85204984786
Wos: WOS:001327705400001
Source Identifiers
ISSN: 0925-3467
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