in SENSORS AND ACTUATORS A-PHYSICAL, ISSN: 0924-4247
Volume: 145, Número: 1-2, Páginas: 75-80 (6)
Conference
14Th International Conference on Solid-State Sensors, Actuators and Microsystems, Date: JUN 10-14, 2007, Location: Lyon, FRANCE, Patrocinadores: CEA, Leti, Minatec, IEEE, IEEE Electron Devices Soc, Elsevier