Fabrication and Electrical Characterization of Low-Temperature Polysilicon Films for Sensor Applications

AuthID
 P-017-TFP
10
Author(s)
Mota, FC
·
Garcia, IS
·
Retolaza, A
·
Santos, DE
·
Sousa, PC
·
Aguiam, DE
·
Dias, RA
·
Calaza, C
·
Silva, AF
·
Alves, FS
Tipo de Documento
Article
Year published
2025
Publicado
in MICROMACHINES, ISSN: 2072-666X
Volume: 16, Número: 1, Páginas: 57 (17)
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Publication Identifiers
Pubmed: 39858712
SCOPUS: 2-s2.0-85216111032
Wos: WOS:001404339000001
Source Identifiers
ISSN: 2072-666X
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