Lithography Optimization with Artificial Intelligence for Thin Film Device Fabrication

AuthID
 P-018-3CW
5
Author(s)
Sørensen, D
·
Brites, G
·
Araujo, DR
·
Macedo, R
·
Tipo de Documento
Article
Year published
2025
Publicado
in IEEE Transactions on Magnetics, ISSN: 0018-9464
Páginas: 1-1
Indexing
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Publication Identifiers
SCOPUS: 2-s2.0-85216621563
Source Identifiers
ISSN: 0018-9464
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