in INTEGRATION OF ADVANCED MICRO-AND NANOELECTRONIC DEVICES-CRITICAL ISSUES AND SOLUTIONS in Materials Research Society Symposium Proceedings, ISSN: 0272-9172
Volume: 811, Páginas: 437-442 (6)
Conference
Symposium on Integration of Advanced Micro-And Nanoelectronic Devices Held at the 2004 Mrs Spring Meeting, Date: APR 13-16, 2004, Location: San Francisco, CA, Patrocinadores: Mat Res Soc