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Influence of the Reactive N-2 Gas Flow on the Properties of Rf-Sputtered Zno Thin Films

AuthID
P-004-6T8

Author(s)

Wang, J

Sallet, V

Tipo de Documento

Article

Year published

2007

Publicado

in THIN SOLID FILMS, ISSN: 0040-6090

Volume: 515, Número: 24, Páginas: 8780-8784 (5)

Conference

1St International Symposium on Transparent Conducting Oxides, Date: OCT 23-25, 2006, Location: Crete, GREECE, Patrocinadores: Perfecture Heraklion, Univ Crete, Phys Dept, Fdn Res & Technol Inst Elect Structure & Lasers

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Publication Identifiers

DOI: 10.1016/j.tsf2007.03.062

SCOPUS: 2-s2.0-34548827052

Wos: WOS:000250497000076

Source Identifiers

ISSN: 0040-6090

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Influence of the Reactive N-2 Gas Flow on the Properties of Rf-Sputtered Zno Thin Films

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Influence of the Reactive N-2 Gas Flow on the Properties of Rf-Sputtered Zno Thin Films

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