Electrostatically Actuated Bilayer Polyimide-Based Microresonators

AuthID
P-004-AZ0
3
Author(s)
Tipo de Documento
Article
Year published
2007
Publicado
in JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN: 0960-1317
Volume: 17, Número: 4, Páginas: 797-803 (7)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-34249069526
Wos: WOS:000245434200023
Source Identifiers
ISSN: 0960-1317
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