Ion Beam Synthesis of Mn/As-Based Clusters in Silicon

AuthID
P-004-B0Y
7
Author(s)
Picht, O
·
Wesch, W
·
Kaiser, U
·
Oliveira, MA
·
Tipo de Documento
Article
Year published
2007
Publicado
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 257, Número: 1-2 SPEC. ISS., Páginas: 90-93 (4)
Conference
15Th International Conference on Ion Beam Modification of Materials, Date: SEP 18-22, 2006, Location: Taormina, ITALY, Patrocinadores: ST Microelect, IMM-CNR, MATIS CNR-INFM, Appl Mat, High Voltage Engn Europe, Axcelis, LPE-ETC, Hitec, Laser Source, 2M Strumenti, Varian, Univ Catania, Fac Sci
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-33947711652
Wos: WOS:000246165500022
Source Identifiers
ISSN: 0168-583X
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