Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing

AuthID
 P-004-B26
7
Author(s)
Berg, S
·
Tipo de Documento
Article
Year published
2007
Publicado
in PLASMA PROCESSES AND POLYMERS, ISSN: 1612-8850
Volume: 4, Número: SUPPL.1, Páginas: S522-S526 (5)
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Scopus®
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Publication Identifiers
SCOPUS: 2-s2.0-51349168910
Wos: WOS:000207735200100
Source Identifiers
ISSN: 1612-8850
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