Surface Micromachining of a Thin Film Microresonator Using Dry Decomposition of a Polymer Sacrificial Layer

AuthID
 P-004-BK1
3
Author(s)
·
Tipo de Documento
Article
Year published
2007
Publicado
in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, ISSN: 1071-1023
Volume: 25, Número: 2, Páginas: 455-458 (4)
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Publication Identifiers
SCOPUS: 2-s2.0-34047147023
Wos: WOS:000246045300028
Source Identifiers
ISSN: 1071-1023
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