Study of the Cathode Potential in a Sputtering Discharge by Pulsing the Reactive Gas: Case of a W Target in an Ar-O-2 Atmosphere

AuthID
 P-004-C9A
3
Author(s)
Tipo de Documento
Article
Year published
2007
Publicado
in PLASMA PROCESSES AND POLYMERS, ISSN: 1612-8850
Volume: 4, Número: 1, Páginas: 62-68 (7)
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Scopus®
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Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-33846669149
Wos: WOS:000244049100008
Source Identifiers
ISSN: 1612-8850
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