Effect of Pre-Implanted Oxygen in Si on the Retention of Implanted He

AuthID
P-004-JA7
8
Author(s)
Manuaba, A
·
Paszti, F
·
Khanh, NQ
·
Zolnai, Z
·
Szilagyi, E
Tipo de Documento
Article
Year published
2006
Publicado
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 249, Número: 1-2 SPEC. ISS., Páginas: 150-152 (3)
Conference
17Th International Conference on Ion Beam Analysis, Date: JUN 26-JUL 01, 2005, Location: Seville, SPAIN, Patrocinadores: Univ Autonoma Madrid, Univ Sevilla, Junta Andalucia, Minist Educ & Ciencia, Consejo Superior Investigaciones Cient, Int Atomic Energy Agcy, European Act COST G8, Boem Phys Soc, High Voltage Engn Europa BV, Banco Santander Cent Hispano, Schering Espana
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-33745865546
Wos: WOS:000239545000039
Source Identifiers
ISSN: 0168-583X
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