Publicações

Raman Spectroscopy Analysis of Magnetron Sputtered Ruo2 Thin Films

AuthID
P-000-F3J

Author(s)

Meng, LJ

Teixeira, V

dos Santos, MP

Editor(es)

Klages C.P.Brauer G.Aegerter M.A.

Tipo de Documento

Article

Year published

2003

Publicado

in THIN SOLID FILMS, ISSN: 0040-6090

Volume: 442, Número: 1-2, Páginas: 93-97 (5)

Conference

4Th International Conference on Coatings on Glass, Date: NOV 03-07, 2002, Location: BRAUNSCHWEIG, GERMANY, Patrocinadores: ICCG Int Organising Comm, Fraunhofer Inst Surface Engn & Thin Films, Fraunhofer Inst Electron Beam & Plasma Technol

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