Structural and Mechanical Properties of Amorphous W-Si-N Sputtered Films After Thermal Annealing

AuthID
 P-000-F4M
2
Author(s)
Tipo de Documento
Article
Year published
2003
Publicado
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 441, Número: 1-2, Páginas: 150-160 (11)
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Scopus®
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Publication Identifiers
SCOPUS: 2-s2.0-0041919791
Wos: WOS:000185165600024
Source Identifiers
ISSN: 0040-6090
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