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Effect of Thermal Annealing on the Optical and Structural Properties of Silicon Implanted with a High Hydrogen Fluence

AuthID
P-004-QEF

Author(s)

Kling, A

Soares, JC

Rodriguez, A

Rodriguez, T

Avella, M

Jimenez, J

Tipo de Documento

Article

Year published

2006

Publicado

in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X

Volume: 242, Número: 1-2, Páginas: 650-652 (3)

Conference

14Th International Conference on Ion Beam Modification of Materials (Ibmm 2004), Date: SEP 05-10, 2004, Location: Pacific Grove, CA, Patrocinadores: Amer Vacuum Soc, NE Calif Chapter

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Publication Identifiers

DOI: 10.1016/j.nimb.2005.08.087

SCOPUS: 2-s2.0-28544432081

Wos: WOS:000236225200177

Source Identifiers

ISSN: 0168-583X

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Effect of Thermal Annealing on the Optical and Structural Properties of Silicon Implanted with a High Hydrogen Fluence

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Effect of Thermal Annealing on the Optical and Structural Properties of Silicon Implanted with a High Hydrogen Fluence

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